About me
Senior scientist, lithography
Research lab: Almaden Research Center
Dr. Ratnam Sooriyakumaran (Soori) is a senior scientist in the lithography group at the IBM Almaden Research Center. Soori is a leading inventor of photoresist materials and was instrumental in developing several new photoresist products that are currently being used in IBM and elsewhere for semiconductor manufacturing. Developing silicon containing resist materials is one of his areas of expertise. He has more than 40 publications and 40 US patents in microelectronic materials and processes. The many awards he has received from IBM include eighteen Invention Achievement Awards and three Outstanding Technical Achievement Awards. He was named a Master Inventor in 2004.
In 2007, he received a corporate Patent Portfolio Award. He was a co-author in two research papers that have received Best Paper Awards: The Photopolymer Science and Technology Award in 1997 and SPIE Grant Willson Award in 2007.
Soori, a native of Sri Lanka, joined IBM Research in 1985 after obtaining his Ph.D. degree in Organic Chemistry from the North Dakota State University. He worked in the IBM Microelectronics Division in East Fishkill for about six years from 1988. His current focus is on advanced resist materials for 193 nm immersion lithography and nanomembranes for water purification.
Last updated 3 Jul 2008