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Volume 41, Number 1/2, Page 39 (1997) Optical lithography   Full article: HTML PDF ASCII   Copyright info     High-numerical-aperture optical designs by R. N. Singh, A. E. Rosenbluth, G. L.-T. Chiu, J. S. Wilczynski This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center. Related Subjects: Lens design; Lithography; Optical lithography; Optical science and technology; Optics

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