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IBM Journal of Research and Development  
Volume 26, Number 2, Page 171 (1982)
Laser Applications
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Modification of Semiconductor Device Characteristics by Lasers

by Y. C. Kiang, J. R. Moulic, W.-K. Chu, A. C. Yen
The paper discusses an emerging area of laser-semiconductor processing: the effect of laser irradiation on the electrical parameters of diffused-junction devices. Shallow diffusions of 0.2- to 0.5-μm depths have been achieved. Transistor current gains have been modified and the results agree with the theoretical analysis.
Related Subjects: Lasers; Physics, solid state; Semiconductor technology