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IBM Journal of Research and Development  
Volume 30, Number 5, Page 520 (1986)
Scanning Tunneling Microscopy II
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A scanning tunneling microscope for the investigation of the growth of metal films on semiconductor surfaces

by T. Berghaus, H. Neddermeyer, S. Tosch
We describe a scanning tunneling microscope which is part of an apparatus designed for the investigation of metal-semiconductor surfaces. The main parts of the tunneling unit are the piezoelectric walker ("louse") carrying the sample for the coarse approach and a piezoelectric xyz system for movement of the tip. The xyz system is self-compensating with regard to uniform thermal expansion. Our first measurements have been obtained on a Au(110) surface. The spatial resolution allows the observation of monoatomic steps. Corrugation perpendicular to the rows and troughs of the (110) surface with an amplitude around 1 Å is also visible. The noise in the z direction under optimum conditions is smaller than 0.2 Å rms.
Related Subjects: Computer applications; Computer-controlled manipulators; Data, structures and accessing; Display technology; Graphics; Image processing; Scanning tunneling microscopy