IBM Journal of Research and Development
IBM Skip to main content
  Home     Products & services     Support & downloads     My account  

  Select a country  
Journals Home  
  Systems Journal  
Journal of Research
and Development
    Current Issue  
    Recent Issues  
    Papers in Progress  
    Recent publications  
    Author's Guide  
  Contact Us  
  Related links:  
     IBM Research  

IBM Journal of Research and Development  
Volume 26, Number 5, Page 528 (1982)
Semiconductor Manufacturing Technology
  Full article: arrowPDF   arrowCopyright info


Semiconductor Manufacturing Technology at IBM

by H. Carre, R. H. Doxtator, M. C. Duffy
IBM's current semiconductor manufacturing processes are summarized. Briefly outlined are highlights of salient features of semiconductor manufacturing that established IBM leadership and direction for embarking on VLSI production. Some of these features are taken from papers already published; others are from articles in this issue of the IBM Journal of Research and Development ranging from silicon crystal growth through quality control and automated logistics and dispositioning of tested product.
Related Subjects: LSI; Manufacturing