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IBM Journal of Research and Development  
Volume 26, Number 5, Page 528 (1982)
Semiconductor Manufacturing Technology
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Semiconductor Manufacturing Technology at IBM

by H. Carre, R. H. Doxtator, M. C. Duffy
IBM's current semiconductor manufacturing processes are summarized. Briefly outlined are highlights of salient features of semiconductor manufacturing that established IBM leadership and direction for embarking on VLSI production. Some of these features are taken from papers already published; others are from articles in this issue of the IBM Journal of Research and Development ranging from silicon crystal growth through quality control and automated logistics and dispositioning of tested product.
Related Subjects: LSI; Manufacturing