Wide-range, low-operating-voltage, bimorph STM: Application as potentiometer
by P. Muralt, D. W. Pohl, W. Denk
An STM is described which operates at voltages ≤120 V. Its 3D scanner offers a wide range of displacements, has low drift and hysteresis, and exhibits good resolution. These features make it interesting for technical applications. In addition, its use as a potentiometer is described.