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IBM Journal of Research and Development  
Volume 19, Number 2, Page 127 (1975)
Nontopical Issue
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Polarization and Depolarization in PSG Films

by L. Kasprzak, A. Hornung
The temperature dependence of the polarization in thin phosphosilicate glass (PSG) films is characterized by an activation energy ΔH = (0.39 + 0.039Et) eV, whereas the decay mechanism has an activation energy of 0.5 eV. The flatband voltage shift due to PSG polarization was linear with applied fields as large as 5.5 × 106 V • cm−1. The effective time constants for the polarization and depolarization are distinctly different. Polarization occurs an order of magnitude faster than depolarization. A physical model has been postulated to explain the observed effects.
Related Subjects: Films; Physics, solid state