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IBM Journal of Research and Development  
Volume 30, Number 5, Page 515 (1986)
Scanning Tunneling Microscopy II
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Construction of a UHV scanning tunneling microscope

by S. Chiang, R. J. Wilson
In our laboratory, we have built an ultrahigh-vacuum scanning tunneling microscope (STM). The STM is mounted onto one flange in an ultrahigh-vacuum chamber which is connected by a transfer chamber to a surface-analysis system equipped with 500-Å-resolution SAM/SEM, XPS, LEED, and sample-heating and sample-cleaning facilities. Samples and tips can be moved throughout the combined vacuum system. We describe the design and performance of the instrument and show some preliminary data on Si(111). We also show some recent results of experiments on tip preparation.
Related Subjects: Films, thin; Materials; Physics, solid state; Remote sensing; Scanning tunneling microscopy; Surface science