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IBM Journal of Research and Development  
Volume 22, Number 6, Page 601 (1978)
AC Gas Panel Displays
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Obtaining Gas Panel Metallization Patterns by Vacuum Deposition Through Rib-supported Mask Structures

by R. Hammer
Gas discharge display panel metallization patterns have been obtained directly in a single vacuum deposition step through rib-supported mask structures. This approach provides a simple alternative to screening or photoetching. The rib-supported structures were developed to solve problems of fabricating masks containing long and narrow closely spaced apertures, poorly supported cantilever sections, and free-standing islands. The design of these structures minimizes shadowing from support ribs by using non-line-of-sight deposition techniques. Made out of graphite to avoid chemical attack during cleaning operations and fabricated by air abrasion machining, the self-supported masks are held in intimate mask-to-substrate contact during vacuum deposition by an electrostatic hold-down technique.
Related Subjects: Fabrication; Gas panels; Masks